XSection@KLayout is a scribt that implements a cross-section generator for the KLayout VLSI layout viewer and editor (http://www.klayout.de).
In order to use the cross section generator, a description of the process must be provided. Such a description is stored in files with extension ".xs". They contain a step-by-step receipe how the layer stack is formed. Statements will describe individual process steps such a etching, deposition and material conversion (i.e. implant).
The tarkit contains one example for such a file in "samples/cmos.xs". This example illustrates how to create a ".xs" and has a lot of documentation inside. Have a look at this file here.
Start KLayout after you have installed the script. You will find a new entry in the "Tools" menu. Choosing "Tools/XSection Scripts/XSection Script" opens a file browser and you are prompted for the .xs file.
To create a cross section, draw a ruler into the layout indicating the line along which the cross section is created. Choose "Tools/XSection Scripts/XSection Script" to select the ".xs" file and to generate the cross section in a new layout window. Once you have used a ".xs" file, it is available in the recently used files list below the "XSection Script" menu entry for fast access.
The following screenshots show two sample cross sections: